| http://www.w3.org/ns/prov#value | - A first aspect of the present invention is a method of forming a conductive wire, comprising: (a) forming a dielectric layer on a substrate; (b) forming a dielectric hardmask layer on a top surface of the dielectric layer; (c) forming an electrically conductive hardmask layer on a top surface of the dielectric hardmask layer; (d) forming a trench extending from a top surface of the conductive hard
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