| http://www.w3.org/ns/prov#value | - front, FIG. 27 is a perspective view of the same as viewed from the back, FIG. 28 is a perspective view showing a substrate holder 113 and the first main body 121 separated, FIG. 29 is a partially broken perspective view of the essential portion of the substrate holder 113 and the first main body 121 in an assembled state, FIG. 30 is a perspective view showing the first main body 121 and the memo
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