About: http://webisa.webdatacommons.org/84429345

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After a new two-step cleaning, a photoresist adhesion promoter such as HMDS is applied onto the structure (prebake time 7 mn), then a standard photoresist, e.g. the e-MERCK resin is applied e.g. in a MTI MULTIFAB equipment, and baked.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com