About: http://webisa.webdatacommons.org/84449967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A fine pattern forming apparatus according to claim 8 wherein said film in which a fine pattern is to be formed is selected from the group consisting of aluminum copper, gold, silver, and alloys mainly composed of any of these metals.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com