| http://www.w3.org/ns/prov#value | - A fourth aspect in accordance with the present invention is a method for making a probe provided with a microprobe chip for detecting evanescent waves comprising the following steps of: forming a film comprising a photoconductive material and having the shape of the microprobe chip on a peeling layer of a first substrate; forming a thin film cantilever on a second substrate; and transferring the f
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