| http://www.w3.org/ns/prov#value | - After sputtering of the layer including titanium oxide, an ion beam source(s) is used to implant at...http://www.google.com/patents/US7052585?utm_source=gb-gplus-sharePatent US7052585 - Coated article including titanium oxycarbide and method of making sameAdvanced Patent SearchPublication numberUS7052585 B2Publication typeGrantApplication numberUS 10/384,797Publication dateMay 30, 2006Filing dateM
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