About: http://webisa.webdatacommons.org/84659320

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An example is a system to measure line widths very precisely on lithographic masks or semiconductor wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com