About: http://webisa.webdatacommons.org/84666337

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this device structure, the first and second electrodes of the MIM capacitor are formed into a shape such as a matrix, drainboard (or ladder), or comb shape in which dishing hardly occurs.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com