About: http://webisa.webdatacommons.org/84774732

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some instances, micro pump chamber 10 including upper section 12 and lower section 14 may be formed from any suitable semi-rigid or rigid material, such as plastic, ceramic, silicon, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr