About: http://webisa.webdatacommons.org/84780292

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an etching liquid for use in the case where the barrier metal film is tungsten or a tungsten compound, the content of an oxidizing agent, such as hydrogen peroxide, is about 1 to 30 wt %.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es