About: http://webisa.webdatacommons.org/84783261

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this step, at least one of the techniques, including photolithography, CVD, etching, is preferably used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com