About: http://webisa.webdatacommons.org/84828495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another alternative is the use of a selective deposition of a low resistivity material such as Ti, W, Cr, Mo, Ta, Pt, Pd, Co or other metals without converting these materials to a silicide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com