About: http://webisa.webdatacommons.org/84913677

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the process of forming via holes in the photosensitive resin that becomes an interlayer insulating film after curing, however, such labor as exposure, development, and curing is required.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com