About: http://webisa.webdatacommons.org/84958548

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Once the sets of fingers are formed, that portion of the substrate lying between the ends, 15a and 16a, of the fingers of each set 15 and 16 is removed by a suitable process such as etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com