About: http://webisa.webdatacommons.org/85065610

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Current rigid disk sputtering machine designs have evolved from semiconductor and thin film head applications with few modifications other than accommodating dual sided deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es