About: http://webisa.webdatacommons.org/85393072

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The coordinate interval can be properly set in view of the above-described points as well as specifications including a chip size on the wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk