About: http://webisa.webdatacommons.org/85408273

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The invention relates to a method for making a semiconductor device and more particularly to making a semiconductor device using a metal oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com