About: http://webisa.webdatacommons.org/8543966

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This embodiment has features that the second insulating film 103 is removed in regions other than the region below the active layer 109 and thereby, the number of unnecessary steps is decreased on the substrate surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de