About: http://webisa.webdatacommons.org/85448093

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The core portion can be exposed and/or developed at 810, and ArF core lithography can be performed while the periphery region is left unexposed, which can result in a configuration such as is illustrated with regard to FIG. 5.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com