About: http://webisa.webdatacommons.org/85568884

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The surface properties such as porosity and thickness of SiOx layers are found to be controlled by SiOx contents and heat treatment conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	mdpi.com