About: http://webisa.webdatacommons.org/85591771

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereupon, in each of the above-mentioned embodiments, it is preferable for the space between the piezoelectric body and the side wall of the substrate or the top plate 20 to be 50 ??m or less and in particular 20 ??m or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com