About: http://webisa.webdatacommons.org/85672131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The microstrip line or pattern 21 of a YBCO thin film is deposited on the SrTiO3 thin film substrate 22 by using sol-gel, chemical vapor deposition, physical vapor deposition, sputtering, laser deposition, or other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr