About: http://webisa.webdatacommons.org/85689890

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 21 can be Sapphire substrate, GaAs substrate, or other substrates known to those skilled in the art, or the combinations of them.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com