About: http://webisa.webdatacommons.org/85744523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The optical waveguide device of claim 1, wherein the semiconductor layer includes a chemical compound including both silicon and germanium. 19.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com