About: http://webisa.webdatacommons.org/85845255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method for determining the end point of a plasma process that uses an increase in a value of a flow of backside gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com