About: http://webisa.webdatacommons.org/85962051

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer 114 can be formed to have a single layer or stacked layers of an insulating layer such as a silicon oxide film, a silicon oxynitride film, a silicon nitride film, a silicon nitride oxide film, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com