About: http://webisa.webdatacommons.org/85964494

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thus, there is a problem that low mechanical strength of the porous film as an insulator film lowers the reliability of a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au