About: http://webisa.webdatacommons.org/86040659

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is applicable to the manufacture of various types of semiconductor devices, particularly high-density semiconductor devices having a design rule of about 0.25 ?? and under; e.g., about 0.18 ??m and under.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com