About: http://webisa.webdatacommons.org/86068561

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer 232 for forming the air-gap 233 may be formed of a material including a nitride layer that has a poor step coverage property.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com