About: http://webisa.webdatacommons.org/86102880

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein said plurality of different types of signals comprises secondary electrons, backscattered electrons, transmitted electrons, cathodoluminescence, x-rays, induced current, Auger electrons and ions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com