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  • The following FIGS. 21-28 illustrate embodiments of a method for fabricating a phase change memory cell, such as phase change memory cell 240a previously described and illustrated with reference to FIG. 20A and phase change memory cell 240b previously described and illustrated with reference to FIG. 20B.FIG. 21 illustrates a cross-sectional view of one embodiment of preprocessed wafer 220.
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