About: http://webisa.webdatacommons.org/86211873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The deposited material may react with gaseous reactive species in the system to produce compounds (oxides, nitrides) or used in conjunction with PVD processes to produce compounds, such as carbide and carbonitrides, or alloys.
http://www.w3.org/ns/prov#wasQuotedFrom	pfonline.com