About: http://webisa.webdatacommons.org/86271164

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The hard mask layer is formed from a dielectric material, such as a silicon dioxide or aluminum oxide, or any of the materials described above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com