About: http://webisa.webdatacommons.org/86346919

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The MEMS image array 10 is formed on a substrate 16, which may consist of silicon, polysilicon, glass, or other material suitable for fabricating the channels (also know as slits or holes) that make up the diffraction grating.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr