About: http://webisa.webdatacommons.org/86357471

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thereafter, the sample was subjected to a scrub-cleaning step to remove particles, such as polishing grains and polishing debris, adhering to the surface of the sample. [0071] Next, the sample was subjected to an etching step.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es