About: http://webisa.webdatacommons.org/86359285

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This eccentric rotation evaporation method is a method effective particularly for cases in which the area of the deposition substrate is large.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com