About: http://webisa.webdatacommons.org/8644744

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, specimens in this invention can be e.g. biological, crystalline or other materials that are probed or structured by the focussed electron beam as well as e.g. wafer or masks whose surface is to be structured.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com