| http://www.w3.org/ns/prov#value | - Next, the pressure in the processing container is 1 to 200 Pa, preferably 1 to 100 Pa, and one or more kinds of rare gases such as helium, argon, xenon, and krypton which are a plasma ignition gas, and dinitrogen monoxide, a rare gas, and silane which are a source gas are introduced.
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