About: http://webisa.webdatacommons.org/86714588

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor manufacturing is a complex process in that it requires different types of equipments (also referred to as tools in semiconductor industry) with various control variables under monitoring.
http://www.w3.org/ns/prov#wasQuotedFrom	deepdyve.com