About: http://webisa.webdatacommons.org/86804158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Generally, voids, such as trenches, are formed in a layer of inter-metal dielectric (???IMD???) and filled with metal.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com