About: http://webisa.webdatacommons.org/87042580

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a simplified flowchart of a method of performing overlay error correction according to an embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com