About: http://webisa.webdatacommons.org/87181669

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 17 is a graph showing a calculated comparison of the illumination profile of the exposure system illustrated in FIGS. 16A and 16B with the illumination profile of the exposure system illustrated in FIGS. 1A and 1B;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com