About: http://webisa.webdatacommons.org/87281282

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a plan and partially broken view schematically showing a wafer chuck according to a third embodiment of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com