About: http://webisa.webdatacommons.org/87284396

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1 is a diagram showing an example of a semiconductor wafer which is a substrate to be inspected according to the present invention;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au