About: http://webisa.webdatacommons.org/87378388

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2A is a diagram illustrating another prior art photolithography apparatus for explaining a second conventional illumination method;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au