About: http://webisa.webdatacommons.org/87441653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph which shows the composition of tungsten nitride formed by the process of the present invention in the depth direction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com