About: http://webisa.webdatacommons.org/87489935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Materials other than tungsten can be used for the capping portion, yet still provide the necessary protection of the interconnect during etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com