About: http://webisa.webdatacommons.org/87902600

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a schematic cross sectional view of the CVD system according to an embodiment of the invention, accompanied by a gas supply system diagram.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es