About: http://webisa.webdatacommons.org/87940292

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a graph of an exemplary process illustrating the control signals for sequentially providing a titanium containing compound and a hydrogen/nitrogen plasma in process chamber 100 (FIG. 2) to deposit a titanium nitride layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es