About: http://webisa.webdatacommons.org/88211372

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 1B is a schematic diagram of the accel-decel electrode used in the implantation system of FIG. 1A. FIG. 1C is an alternative embodiment of a high-current cluster ion implantation system in accordance with the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com